Structure and composition investigation of RPECVD SiCN and LPCVD BCN films M. L. Kosinova, N.I. Fainer, Yu. M. Rumyantsev, M. Terauchi, K. Shibata, F. Satoh, M. Tanaka et F. A. KuznetsovJ. Phys. IV France, 11 PR3 (2001) Pr3-987-Pr3-994DOI: https://doi.org/10.1051/jp4:20013124
