Room temperature deposition of GeO2 thin film using dielectric barrier discharge driven excimer lamps Y. Maezono, H. Yanagita, K. Nishi, J.-I. Miyano, A. Yokotani, K. Kurosawa, N. Hishinuma et H. MatsunoJ. Phys. IV France, 11 PR3 (2001) Pr3-811-Pr3-816DOI: https://doi.org/10.1051/jp4:20013102
