Elementary steps and application of the CVD of SiC/BN double layers S. Hemeltjen, J. Heinrich, G. Marx, D. Dietrich, K. Nestler, K. Weise et S. StöckelJ. Phys. IV France, 11 PR3 (2001) Pr3-77-Pr3-84DOI: https://doi.org/10.1051/jp4:2001310