Effects of active surface nitridation on the properties of high permittivity films deposited by UV-assisted CVD
B. J. O'Sullivan, E. O'Connor, R. Howley, P. K. Hurley, J.-Y. Zhang, N. Kaliwoh, Q. Fang, I. W. Boyd, C. Dubourdieu, M. A. Audier, J. P. Sénateur, H. O. Davies, T. J. Leedham, A. C. Jones et B. Semmache
J. Phys. IV France, 11 PR11 (2001) Pr11-261-Pr11-265
