Preparation and characterization of some alumosiloxanes as single-source MOCVD precursors for aluminosilicate coatings S. M. Zemskova, J. A. Haynes, T. M. Besmann, R. D. Hunt, D. B. Beach et V. N. GolovlevJ. Phys. IV France, 10 PR2 (2000) Pr2-35-Pr2-42DOI: https://doi.org/10.1051/jp4:2000205
