RPECVD thin silicon carbonitride films using hexamethyldisilazane N. I. Fainer, M. L. Kosinova, Yu. M. Rumyantsev et F. A. KuznetsovJ. Phys. IV France, 09 PR8 (1999) Pr8-769-Pr8-775DOI: https://doi.org/10.1051/jp4:1999897
