CVD induced by ion beams for the preparation of oxide and nitride thin films A. R. González-Elipe, J. P. Espinós, A. Barranco, F. Yubero et A. CaballeroJ. Phys. IV France, 09 PR8 (1999) Pr8-699-Pr8-708DOI: https://doi.org/10.1051/jp4:1999888
