Deposition of Ta2O5 and (TiO2)-(Ta2O5) films from Ta(OEt)4(DMAE) and Ti(OEt)2(DMAE)2, by IMOCVD C. Jiménez, M. Paillous, R. Madar, J. P. Sénateur et A. C. JonesJ. Phys. IV France, 09 PR8 (1999) Pr8-569-Pr8-573DOI: https://doi.org/10.1051/jp4:1999871
