Layer-by-layer growth of silicon nitride films by NH3 and SiH4 T. Watanabe, M. Sakuraba, T. Matsuura et J. MurotaJ. Phys. IV France, 09 PR8 (1999) Pr8-333-Pr8-340DOI: https://doi.org/10.1051/jp4:1999841
