2D and 1D modeling of AMT barrel reactors for silicon deposition M. Masi, C. Cavallotti, S. Carrà, D. Crippa et G. VaccariJ. Phys. IV France, 09 PR8 (1999) Pr8-273-Pr8-280DOI: https://doi.org/10.1051/jp4:1999834
