Study of the precursor injection in a remote microwave PECVD reactor L. Foucher, F. Naudin, P. Duverneuil, C. Tixier et J. DesmaisonJ. Phys. IV France, 09 PR8 (1999) Pr8-141-Pr8-148DOI: https://doi.org/10.1051/jp4:1999817
