CVD niobium in Nb-Hal-(H)-inert gas systems : A thermodynamic and experimental approaches A. N. Golubenko, S. V. Sysoev, A. A. Titov et Yu. G. SteninJ. Phys. IV France, 09 PR8 (1999) Pr8-93-Pr8-99DOI: https://doi.org/10.1051/jp4:1999812
