LPCVD boron carbonitride films from triethylamine borane M. L. Kosinova, N. I. Fainer, Yu. M. Rumyantsev, A. N. Golubenko et F. A. KuznetsovJ. Phys. IV France, 09 PR8 (1999) Pr8-915-Pr8-921DOI: https://doi.org/10.1051/jp4:19998115
