Routes of metal oxide formation from metal β-diketonates used as CVD precursors A. E. Turgambaeva, V. V. Krisyuk, A. F. Bykov et I. K. IgumenovJ. Phys. IV France, 09 PR8 (1999) Pr8-65-Pr8-72DOI: https://doi.org/10.1051/jp4:1999808