Nanofabrication at a 10 nm length scale: Limits of lift-off and electroplating transfer processes A. M. Haghiri-Gosnet, C. Vieu, G. Simon, M. Mejias, F. Carcenac et H. LaunoisJ. Phys. IV France, 09 PR2 (1999) Pr2-133-DOI: https://doi.org/10.1051/jp4:1999214