Photosensitive sol-gel precursors for direct ultra-violet patterning of SiO2 and PZT materials S. P. Faure, O. Chaux et P. GaucherJ. Phys. IV France, 08 PR9 (1998) Pr9-69-Pr9-72DOI: https://doi.org/10.1051/jp4:1998911
