Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance P. Raynaud, C. Marlière, D. Berthomieux, Y. Segui, J. Durand et R. BurkeJ. Phys. IV France, 08 PR7 (1998) Pr7-265-Pr7-272DOI: https://doi.org/10.1051/jp4:1998722