X-ray lithography : an overview and recent activities at super-ACO F. Rousseaux, A. M. Haghiri-Gosnet, Y. Chen, M. F. Ravet et H. LaunoisJ. Phys. IV France, 04 C9 (1994) C9-237-C9-244DOI: https://doi.org/10.1051/jp4:1994942
