Preparation of small-area Al/AlOx/Al tunnel junctions in a self-aligned in-line technology and observation of the Coulomb blockade M. Götz, P. Thieme, K. Blüthner, W. Krech, D. Born, S. Götz, H.-J. Fuchs, E.-B. Kley, Th. Wagner et G. EskaJ. Phys. IV France, 04 C6 (1994) C6-223-C6-228DOI: https://doi.org/10.1051/jp4:1994636
