A study of AlN-Si3N4 codeposits using the L.P.C.V.D. technique F. HENRY, B. ARMAS, M. BALAT, R. BERJOAN et C. COMBESCUREJ. Phys. IV France, 03 C3 (1993) C3-519-C3-526DOI: https://doi.org/10.1051/jp4:1993372
