Physical and tribological properties of a-Si1-xCx : H coatings prepared by r.f. plama-assisted chemical vapour deposition J. SMEETS, J. MENEVE, R. JACOBS, L. EERSELS et E. DEKEMPENEERJ. Phys. IV France, 03 C3 (1993) C3-503-C3-510DOI: https://doi.org/10.1051/jp4:1993370
