Comparison of physical and electrical properties of ULPCVD and VLPCVD in situ phosphorus doped polysilicon or undoped polysilicon M. SARRET, A. LIBA, O. BONNAUD, F. LE BIHAN et B. FORTINJ. Phys. IV France, 03 C3 (1993) C3-411-C3-417DOI: https://doi.org/10.1051/jp4:1993357
