Rare earth β-diketonate and carboxylate metal complexes as precursors for MOCVD of oxide films N. P. KUZMINA, L. I. MARTYNENKO, Z. A. TU, A. R. KAUL, G. V. GIRICHEV, N. I. GIRICHEVA, A. N. RYKOV et Y. M. KORENEVJ. Phys. IV France, 03 C3 (1993) C3-385-C3-390DOI: https://doi.org/10.1051/jp4:1993353