Transport phenomena in a cold wall vertical reactor for metalorganic vapor phase growth of β-SiC layers H. CHEHOUANI, S. BENET, B. ARMAS, C. COMBESCURE, A. FIGUERAS et S. GARELIKJ. Phys. IV France, 03 C3 (1993) C3-131-C3-138DOI: https://doi.org/10.1051/jp4:1993316
