The thermodynamic properties of tetraethoxysilane (TEOS) and an infrared study of its thermal decomposition M.G.M. VAN DER VIS, E. H.P. CORDFUNKE et R. J.M. KONINGSJ. Phys. IV France, 03 C3 (1993) C3-75-C3-82DOI: https://doi.org/10.1051/jp4:1993309
