EXCIMER-LASER-INDUCED CHEMICAL VAPOR DEPOSITION OF COPPER FILMS FROM COPPER TRIFLUOROACETYLACETONATE E. N. ANTONOV, V. N. BAGRATASHVILI, O. V. FATEEV et V. A. SEMCHISHENJ. Phys. IV France, 01 C7 (1991) C7-671DOI: https://doi.org/10.1051/jp4:19917179
