PLANARIZED LOW-STRESS OXIDE/NITRIDE PASSIVATION FOR ULSI DEVICES H. TREICHEL, R. BRAUN, Z. GABRIC, O. SPINDLER et A. GSCHWANDTNERJ. Phys. IV France, 02 C2 (1991) C2-839-C2-846DOI: https://doi.org/10.1051/jp4:1991299
