GRAIN REFINEMENT OF CVD TiC LAYERS BY AlCl3, ZrCl4 AND BCl3 IMPURITIES A. OSADA, M. DANZINGER, R. HAUBNER et B. LUXJ. Phys. IV France, 02 C2 (1991) C2-557-C2-562DOI: https://doi.org/10.1051/jp4:1991266
