INFLUENCE OF EXCITATION FREQUENCY ON ORIENTED (10(-1)0) GROWTH OF ALUMINIUM NITRIDE THIN FILMS BY PECVD N. AZEMA, J. DURAND, R. BERJOAN, J. L. BALLADORE et L. COTJ. Phys. IV France, 02 C2 (1991) C2-405-C2-412DOI: https://doi.org/10.1051/jp4:1991249
