PLASMAS : SOURCES OF EXCITED, DISSOCIATED AND IONIZED SPECIES. CONSEQUENCES FOR CHEMICAL VAPOR DEPOSITION (CVD) AND FOR SURFACE TREATMENT A. GICQUEL et Y. CATHERINEJ. Phys. IV France, 02 C2 (1991) C2-343-C2-356DOI: https://doi.org/10.1051/jp4:1991242
