THE INFLUENCE OF WATER VAPOR ON THE SELECTIVE LOW PRESSURE CVD OF COPPER B. LECOHIER, J.-M. PHILIPPOZ, B. CALPINI, T. STUMM et H. VAN DEN BERGHJ. Phys. IV France, 02 C2 (1991) C2-279-C2-286DOI: https://doi.org/10.1051/jp4:1991234
