THE APPLICATION OF A SUPERSONIC MOLECULAR BEAM SCATTERING SYSTEM TO UNDERSTANDING CVD PROCESSES W. AHMED, J. S. FOORD, N. K. SINGH et R. D. PILKINGTONJ. Phys. IV France, 02 C2 (1991) C2-193-C2-199DOI: https://doi.org/10.1051/jp4:1991224
