IN SITU ELLIPSOMETRY, A MEASUREMENT TECHNIQUE FOR DYNAMIC FILM CHARACTERIZATION AND PROCESS DEVELOPMENT M. TAMME, R. KAMILLI, P. PADUSCHEK, P. MONTGOMERY et S. ILLSLEYJ. Phys. IV France, 02 C2 (1991) C2-183DOI: https://doi.org/10.1051/jp4:1991222
