SELECTIVE R.T.L.P.C.V.D. OF TUNGSTEN BY SILANE REDUCTION ON PATTERNED PPQ/Si WAFERS A. BOUTEVILLE, T. CHARRIER, J. C. REMY, J. PALLEAU et J. TORRESJ. Phys. IV France, 02 C2 (1991) C2-857-C2-864DOI: https://doi.org/10.1051/jp4:19912102
