A STUDY ON THE THERMODYNAMICS AND KINETICS OF TUNGSTEN DEPOSITION BY WF6 AND GeH4 C.A. VAN DER JEUGD, G. J. LEUSINK, G. C.A.M. JANSSEN et S. RADELAARJ. Phys. IV France, 02 C2 (1991) C2-849-C2-856DOI: https://doi.org/10.1051/jp4:19912101
