AN UNDERSTANDING OF IN SITU BORON DOPED POLYSILICON FILMS BY CHARACTERIZATION AND SIMULATION C. AZZARO, E. SCHEID, D. BIELLE-DASPET, P. DUVERNEUIL et P. BOUDREJ. Phys. IV France, 02 C2 (1991) C2-79-C2-85DOI: https://doi.org/10.1051/jp4:1991209
