A NOVEL WAFER CAGE FOR BETTER UNIFORMITY OF PHOSPHORUS DOPED SILICON LAYERS : EXPERIMENTAL STUDY AND MODELLING C. AZZARO, P. DUVERNEUIL et J. P. COUDERCJ. Phys. IV France, 02 C2 (1991) C2-71-C2-78DOI: https://doi.org/10.1051/jp4:1991208
