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Cited article:

A Novel MEMS Resonant Accelerometer With Gas Damper Based on Triple-Stack Wafer Bonding Technique

Ting Yang, Dongxiang Han, Jun Xu and Tian-Ling Ren
Journal of Microelectromechanical Systems 35 (1) 40 (2026)
https://doi.org/10.1109/JMEMS.2025.3615388