Article cité par

La fonctionnalité Article cité par… liste les citations d'un article. Ces citations proviennent de la base de données des articles de EDP Sciences, ainsi que des bases de données d'autres éditeurs participant au programme CrossRef Cited-by Linking Program. Vous pouvez définir une alerte courriel pour être prévenu de la parution d'un nouvel article citant " cet article (voir sur la page du résumé de l'article le menu à droite).

Article cité :

MOCVD of aluminium oxide films using aluminium β-diketonates as precursors

A. Devi, S.A. Shivashankar, A.G. Samuelson

J. Phys. IV France, 12 4 (2002) 139-146

DOI: https://doi.org/10.1051/jp4:20020088

PDF (728.8 KB)

Citations de cet article :

AlOx Thin Films Synthesized by Mist Chemical Vapor Deposition, Monitored by a Fast-Scanning Mobility Particle Analyzer, and Applied as a Gate Insulating Layer in the Field-Effect Transistors

Arifuzzaman Rajib, Abdul Kuddus, Tomohiro Shida, Keiji Ueno and Hajime Shirai
ACS Applied Electronic Materials 3 (2) 658 (2021)
https://doi.org/10.1021/acsaelm.0c00758

Novel carbonaceous ZnO composite prepared through inert-ambient pyrolysis of the zinc anthranilate complex

M Srinidhi Raghavan and S A Shivashankar
Materials Research Express 6 (9) 095623 (2019)
https://doi.org/10.1088/2053-1591/ab3509

Low-temperature thermodynamic properties of Al(C5HF6O2)3

M.A. Bespyatov and T.M. Kuzin
The Journal of Chemical Thermodynamics 138 98 (2019)
https://doi.org/10.1016/j.jct.2019.06.013

Low-temperature heat capacity of Al(C11H19O2)3

Michael A. Bespyatov, Ivan S. Chernyaikin, Viktor N. Naumov, Pavel A. Stabnikov and Nikolay V. Gelfond
Thermochimica Acta 596 40 (2014)
https://doi.org/10.1016/j.tca.2014.09.017

Effects of laser power on the growth of polycrystalline AlN films by laser chemical vapor deposition method

Yu You, Akihiko Ito, Rong Tu and Takashi Goto
Surface and Coatings Technology 232 1 (2013)
https://doi.org/10.1016/j.surfcoat.2013.04.043

Effect of NH₃ Atmosphere on Preparation of Al₂O₃-AlN Composite Film by Laser CVD

Yu You, Akihiko Ito, Rong Tu and Takashi Goto
Key Engineering Materials 484 172 (2011)
https://doi.org/10.4028/www.scientific.net/KEM.484.172

Amorphous-like nanocrystalline γ-Al2O3 films prepared by MOCVD

Akihiko Ito, Rong Tu and Takashi Goto
Surface and Coatings Technology 204 (14) 2170 (2010)
https://doi.org/10.1016/j.surfcoat.2009.11.043

Moderate temperature and high-speed synthesis of α-Al2O3 films by laser chemical vapor deposition using Nd:YAG laser

Hokuto Kadokura, Akihiko Ito, Teiichi Kimura and Takashi Goto
Surface and Coatings Technology 204 (14) 2302 (2010)
https://doi.org/10.1016/j.surfcoat.2009.12.029

Low-temperature deposition of α-Al2O3 films by laser chemical vapor deposition using a diode laser

Yu You, Akihiko Ito, Rong Tu and Takashi Goto
Applied Surface Science 256 (12) 3906 (2010)
https://doi.org/10.1016/j.apsusc.2010.01.048

Crystallinity of Al2O3 films deposited by metalorganic chemical vapor deposition

Siddhartha K. Pradhan, Philip J. Reucroft and Yeonkyu Ko
Surface and Coatings Technology 176 (3) 382 (2004)
https://doi.org/10.1016/S0257-8972(03)00750-3