Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Growth of BON thin films by plasma assisted MOCVD and study of deposition parameter effects on the film structure

G.C. Chen, M.C. Kim, T.H. Kim, S.-B. Lee, J.-H. Boo

J. Phys. IV France, 11 PR3 (2001) Pr3-763-Pr3-770

DOI: https://doi.org/10.1051/jp4:2001396

PDF (328.1 KB)

This article has been cited by the following article(s):

Mechanical and Electrical Properties of Boron-Oxygen-Nitrogen Film as Buffer Layer

Guang Chao Chen, B. Li, Yu Mei Tong, Fan Xiu Lu and Jin Hyo Boo
Key Engineering Materials 336-338 2586 (2007)
https://doi.org/10.4028/www.scientific.net/KEM.336-338.2586

Oxidation of BON and Si-DLC thin films

J.W. Kim, B. Hong, D.C. Lim and D. B. Lee
Surface and Coatings Technology 193 (1-3) 288 (2005)
https://doi.org/10.1016/j.surfcoat.2004.08.168

Synthesis of a material for semiconductor applications: Boron oxynitride prepared by low frequency rf plasma-assisted metalorganic chemical vapor deposition

G. C. Chen, D.-C. Lim, S.-B. Lee, et al.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 21 (4) 1886 (2003)
https://doi.org/10.1116/1.1585072

Structures and properties of BON and multilayered TiN/BON thin films prepared by PAMOCVD method

D.-C Lim, G.C Chen, S.-B Lee and J.-H Boo
Surface and Coatings Technology 163-164 318 (2003)
https://doi.org/10.1016/S0257-8972(02)00636-9