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Cited article:

Microstructure of SiC deposited from methyltrichlorosilane

Boris Reznik, Dagmar Gerthsen, Weigang Zhang and Klaus J. Hüttinger
Journal of the European Ceramic Society 23 (9) 1499 (2003)
https://doi.org/10.1016/S0955-2219(02)00364-3