CVD induced by ion beams for the preparation of oxide and nitride thin films
J. Phys. IV France, 09 PR8 (1999) Pr8-699-Pr8-708
Articles citing this article
The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).
Cited article:
This article has been cited by the following article(s):
Electrical characteristics of mixed Zr–Si oxide thin films prepared by ion beam induced chemical vapor deposition at room temperature
F.J. Ferrer, F. Frutos, J. García-López, C. Jiménez and F. YuberoThin Solid Films 517 (18) 5446 (2009)
https://doi.org/10.1016/j.tsf.2009.01.099
Size and shape of supported zirconia nanoparticles determined by x-ray photoelectron spectroscopy
F. Yubero, C. Mansilla, F. J. Ferrer, J. P. Holgado and A. R. González-ElipeJournal of Applied Physics 101 (12) 124910 (2007)
https://doi.org/10.1063/1.2749482
Optical refractive index and static permittivity of mixed Zr–Si oxide thin films prepared by ion beam induced CVD
F.J. Ferrer, F. Frutos, J. García-López, A.R. González-Elipe and F. YuberoThin Solid Films 516 (2-4) 481 (2007)
https://doi.org/10.1016/j.tsf.2007.07.139
Angle dependence of the O K edge absorption spectra of TiO2 thin films with preferential texture
S. Räth, F. Gracia, F. Yubero, et al.Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 200 248 (2003)
https://doi.org/10.1016/S0168-583X(02)01686-5
Structural modifications produced by the incorporation of Ar within the lattice of Fe2O3 thin films prepared by ion beam induced chemical vapour deposition
F Yubero, M Ocaña, A Caballero and A.R González-ElipeActa Materialia 48 (18-19) 4555 (2000)
https://doi.org/10.1016/S1359-6454(00)00241-X