Articles citing this article

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Cited article:

In-situ Fourier transform infrared spectroscopy gas phase studies of vanadium (IV) oxide coating by atmospheric pressure chemical vapour deposition using vanadyl (IV) acetylacetonate

D. Vernardou, M.E. Pemble and D.W. Sheel
Thin Solid Films 516 (14) 4502 (2008)
https://doi.org/10.1016/j.tsf.2007.06.026

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

G. Wahl, J. Arndt and O. Stadel
Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies 145 (2002)
https://doi.org/10.1007/978-94-010-0353-7_7

NESSPIOM—Network for enhanced semiconductor surface processing through in situ optical monitoring

Martyn E. Pemble
Surface and Interface Analysis 31 (10) 1012 (2001)
https://doi.org/10.1002/sia.1136