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Routes of metal oxide formation from metal β-diketonates used as CVD precursors

A.E. Turgambaeva, V.V. Krisyuk, A.F. Bykov, I.K. Igumenov

J. Phys. IV France, 09 PR8 (1999) Pr8-65-Pr8-72

DOI: https://doi.org/10.1051/jp4:1999808

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Citations de cet article :

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Chemical Vapor Deposition 11 (5) 261 (2005)
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