J. Phys. IV France 03 (1993) C3-99-C3-105
Mass spectrometry study of the gas phase reactions in the CVD of Si and in situ-phosphorus doped Si in order to explain the different growth ratesJ. SIMON, R. FEURER, A. REYNES and R. MORANCHO
Laboratoire des Matériaux, URA 445 du CNRS, Institut National Polytechnique de Toulouse, ENSCT, 118 route de Narbonne, 31077 Toulouse cedex, France
The experiments have been carried out in a vertical impinging jet type reactor in order to have a kinetically controlled growth. Two types of heating modes were used : hot wall reactor (HWR) and cold wall reactor (CWR). The gas phase compositions have been determined by coupling the reactor to a quadrupole mass spectrometer (QMS), while the growth rates were measured versus temperature and phosphine to disilane molar ratio in order to determine the species responsible for the deposits. Disilane draws a decrease in the inhibition of the growth rate which is 4 times less than in the case of monosilane as starting product. In contrast, phosphorus incorporation, which is in the range 1,5.1019-8.1020 atom cm-3, keeps the same order of magnitude.
© EDP Sciences 1993