Numéro |
J. Phys. IV France
Volume 117, October 2004
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Page(s) | 1 - 6 | |
DOI | https://doi.org/10.1051/jp4:2004117001 |
J. Phys. IV France 117 (2004) 1-6
DOI: 10.1051/jp4:2004117001
Application of photoacoustic method and evolutionary algorithm for determination of thermal properties of layered structure
R. Arsoba and Z. SuszynskiTechnical University of Koszalin, 75-453 Koszalin, Poland
Abstract
In this paper, a method of determination of thermal parameters in a multilayer structure is presented. The main purpose of
the method is to evaluate the quotient of thermal effusivities
as well as the quotient of thickness and square root of thermal diffusivity d
for each layer. The method developed consists in comparison of measured frequency characteristics of thermal impedance with
theoretical ones. The measurements of characteristics were carried out with the help of a photoacoustic microscope. The transmission
line matrix (TLM) was used for determination of the temperature response of the structure for harmonic excitation. A method
based on an evolutionary algorithm was applied to evaluate thermal properties of examined structure. The aim of this method
was to find the best fitness of thermal impedance of the model to the measured impedance of the examined object. In the paper,
results of investigation of layered structure silicon-aluminium-molybdenum are presented. The method presented can be applied
to determine thermal properties of multilayer structures such as semiconductor-substrate structures, metal-ceramics structures.
© EDP Sciences 2004