Pulsed laser deposited barium strontium titanate thin films : Cristallographic and dielectric characterizations

S. Liebus; C. Girault-Di Bin; F. Cosset; A. Celerier; J.C. Vareille

doi:doi:10.1051/jp4:20011131

Numéro		J. Phys. IV France Volume 11, Numéro PR11, Décembre 2001 International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures


Page(s)		Pr11-193 - Pr11-197
DOI		https://doi.org/10.1051/jp4:20011131

International Conference on Thin Film Deposition of Oxide Multilayers Hybrid Structures

J. Phys. IV France 11 (2001) Pr11-193-Pr11-197
DOI: 10.1051/jp4:20011131

Pulsed laser deposited barium strontium titanate thin films : Cristallographic and dielectric characterizations

S. Liebus, C. Girault-Di Bin, F. Cosset, A. Celerier and J.C. Vareille

Laboratoire IRCOM, UMR 6615 du CNRS, Équipe Composants et Circuits Microélectroniques et Microoptiques, 123 avenue Albert Thomas, 87060 Limoges cedex, France

Abstract
The use of thin films of ferroelectric materials as a non-linear dielectric at microwave frequencies and the integration of tunable dielectrics is actively being investigated for a variety of advanced high frequency applications. This paper is devoted to the elaboration of Sr_xBa_1-xTiO₃ (BST) thin films by the pulsed laser deposition technique. The influence of several parameters like substrate temperature and oxygen pressure on the characteristics of these films are investigated by X-ray diffraction for the crystallographic structure and Rutherford Backscattering Spectroscopy for the composition. A cavity resonator technique is used to determine the relative dielectric permittivity of the BST layers.