| Numéro |
J. Phys. IV France
Volume 09, Numéro PR8, September 1999
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
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|---|---|---|
| Page(s) | Pr8-1123 - Pr8-1130 | |
| DOI | https://doi.org/10.1051/jp4:19998140 | |
Proceedings of the Twelfth European Conference on Chemical Vapour Deposition
J. Phys. IV France 09 (1999) Pr8-1123-Pr8-1130
DOI: 10.1051/jp4:19998140
Chemnitz University of Technology, Department of Chemistry, 09107 Chemnitz, Germany
© EDP Sciences 1999
J. Phys. IV France 09 (1999) Pr8-1123-Pr8-1130
DOI: 10.1051/jp4:19998140
CVD of mono and double-layers on Si-B-N-C fibres
K. Nestler, D. Dietrich, A. Preidel, K. Weise, S. Stöckel, N. Meyer and G. MarxChemnitz University of Technology, Department of Chemistry, 09107 Chemnitz, Germany
Abstract
The reinforcement effects of the fibres in metal matrix composites (MMC) or ceramic matrix composites (CMC) are widely influenced by coatings acting as diffusion barriers, sliding layers or protection against oxidation. Mono layers and double-layer systems was deposited by isothermal CVD process to newly developed ceramic fibres [1] of type of quarternary ceramic Si-B-N-C. The design of continuous multi-stage deposition process and the effect of chemical composition of deposited films will be discussed. Variations of layer compositions were extensively investigated by SEM, TEM, SIMS, XPS and Raman spectroscopy. A great importance was attached to characterization of interfaces.
© EDP Sciences 1999