| Numéro |
J. Phys. IV France
Volume 04, Numéro C7, Juillet 1994
8th International Topical Meeting on Photoacoustic and Photothermal Phenomena8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique |
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|---|---|---|
| Page(s) | C7-11 - C7-14 | |
| DOI | https://doi.org/10.1051/jp4:1994703 | |
8th International Topical Meeting on Photoacoustic and Photothermal Phenomena
8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-11-C7-14
DOI: 10.1051/jp4:1994703
1 Institut für Optik und Quantenelektronik, Friedrich-Schiller-Universität, Max-Wien-Platz 1, 07743 Jena, Germany
2 Fraunhofer-Institut für Angewandte Optik und Feinmchanik, Schillerstrasse 1, 07745 Jena, Germany
© EDP Sciences 1994
8 ITMP3 / 8éme conférence internationale de photoacoustique et photothermique
J. Phys. IV France 04 (1994) C7-11-C7-14
DOI: 10.1051/jp4:1994703
Description of an interferometric photothermal microscope and its application to the study of semiconductor samples
K. Haupt1, A. Glazov1, H.G. Walther1 and E. Döpel21 Institut für Optik und Quantenelektronik, Friedrich-Schiller-Universität, Max-Wien-Platz 1, 07743 Jena, Germany
2 Fraunhofer-Institut für Angewandte Optik und Feinmchanik, Schillerstrasse 1, 07745 Jena, Germany
Abstract
A computerized scanning microscope is described which is equipped with a photothermal sensor. Two types of sensors have been developed both being based on probing the thermal lens above the heating spot by a Mach-Zehnder interferometer. One interferometer was built up from separate optical components while the other one was designed as a microoptical block connected by a gradient index lens and optical fibres with a laser diode and a photodiode. Measurements from structured semiconductors are presented demonstrating the performance of the photothermal microscope.
© EDP Sciences 1994