| Numéro |
J. Phys. IV France
Volume 02, Numéro C2, Septembre 1991
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
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|---|---|---|
| Page(s) | C2-713 - C2-720 | |
| DOI | https://doi.org/10.1051/jp4:1991286 | |
Proceedings of the Eighth European Conference on Chemical Vapour Deposition / Actes de la 8ème Confèrence Européenne sur les Dépôts Chimiques en Phase Gazeuse
J. Phys. IV France 02 (1991) C2-713-C2-720
DOI: 10.1051/jp4:1991286
1 Institut für Chemische Technik der Universität Karlsruhe, Germany
2 Asea Brown Boveri AG, Corporate Research Heidelberg, P.O. Box 10 13 32, D-6900 Heidelberg 1, Germany
3 Institut für Oberflächentechnik der Technischen, Universität Braunschweig, Germany
© EDP Sciences 1991
J. Phys. IV France 02 (1991) C2-713-C2-720
DOI: 10.1051/jp4:1991286
THE Ba-PROBLEM IN CVD-YBa2 Cu3 O7-[MATH] HTC SUPERCONDUCTORS
E. FITZER1, H. OETZMANN2, F. SCHMADERER2 and G. WAHL31 Institut für Chemische Technik der Universität Karlsruhe, Germany
2 Asea Brown Boveri AG, Corporate Research Heidelberg, P.O. Box 10 13 32, D-6900 Heidelberg 1, Germany
3 Institut für Oberflächentechnik der Technischen, Universität Braunschweig, Germany
Abstract
The evaporation behaviour of Ba(thd)2 in a CVD-process for HTc-Superconductors is presented. The long-time stability as well as possibilities to increase the evaporation rates by changing the geometry of the evaporator and the process conditions
are discussed.
© EDP Sciences 1991